Tech News |
Improving the reliability of dry vacuum pumps in high-k ALD processesDesign features that contributed most to the improved performance include increased rotational speed, integrated rotor sleeves, and increased purge injection temperature. |
Precision growth of light-emitting nanowiresA novel approach to growing nanowires promises a new means of control over their light-emitting and electronic properties. |
Imec introduces new snapshot hyperspectral image sensors with mosaic filter architectureAt next week's SPIE Photonics West 2015, imec will present a new set of snapshot hyperspectral CMOS image sensors featuring spectral filter structures in a mosaic layout, processed per-pixel on 4x4 and 5x5 'Bayer-like' arrays. |
Fabrication of patterns with linewidths down to 1.5nmResearchers at aBeam Technologies, Lawrence Berkeley National Laboratory and Argonne National Laboratory have developed a technology to fabricate test patterns with a minimum linewidth down to 1.5nm. |