ON-DEMAND WEBCAST: The next move in metrology and defectivity for the semiconductor industry - The semiconductor industry today is showing two major trends, as we are approaching the end of the Moore’s Law era. First, the complexity of the process flow used to make a device has increased extremely fast in recent years. Second, market demands extend beyond the device to the system, which integrates different functions to achieve a task, leading to 3D integration approaches. The presentation will cover our vision of the consequences of those trends in metrology and defectivity requirements. Carlos Beitia is the Metrology and Defectivity Manager, CEA-Leti, will present: the use of more and more in-lab characterization to complement in-line metrology; the need to combine measurements whether to improve uncertainty in a given parameter or improve knowledge of the object under study; the need for in-die characterization that provides information to complete the picture at transistor and wafer level; 3D integration problems, and more. Speakers: Winfield Scott, Director of Technology, Evans Analytical Group Carlos Beitia, Metrology and Defectivity Manager, CEA-Leti |
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